APA (7th ed.) Citation

Seong Hwang, C., & Yoo, C. Y. (2014). Atomic Layer Deposition for Semiconductors. Springer.

Chicago Style (17th ed.) Citation

Seong Hwang, Cheol, and Cha Young Yoo. Atomic Layer Deposition for Semiconductors. New York: Springer, 2014.

MLA (8th ed.) Citation

Seong Hwang, Cheol, and Cha Young Yoo. Atomic Layer Deposition for Semiconductors. Springer, 2014.