Scanning electron microscopy : physics of image formation and microanalysis /

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Bibliographic Details
Author / Creator:Reimer, Ludwig, 1928-
Edition:Second completely revised and updated edition.
Imprint:Berlin ; New York : Springer, [1998]
©1998
Description:1 online resource (xiv, 527 pages) : illustrations.
Language:English
Series:Springer series in optical sciences ; volume 45
Springer series in optical sciences ; v. 45.
Subject:
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/11086185
Hidden Bibliographic Details
ISBN:9783540389675
3540389679
9783642083723
3642083722
3540639764
9783540639763
Notes:Includes bibliographical references and index.
Print version record.
Summary:Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Other form:Print version: Reimer, Ludwig, 1928- Scanning electron microscopy. Second completely revised and updated edition 3540639764
Standard no.:10.1007/978-3-540-38967-5

MARC

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505 0 |a 1. Introduction -- 2. Electron optics of a scanning electron microscope -- 3. Electron scattering and diffusion -- 4. Emission of backscattered and secondary electrons -- 5. Electron detectors and spectrometers -- 6. Image contrast and signal processing -- 7. Electron-beam-induced current and cathodoluminescence -- 8. Special techniques in SEM -- 9. Crystal structure analysis by diffraction -- 10. Elemental analysis and imaging with X-rays. 
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