Scanning electron microscopy : physics of image formation and microanalysis /

Scanning electron microscopy : physics of image formation and microanalysis /

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Bibliographic Details
Author / Creator:	Reimer, Ludwig, 1928-
Edition:	Second completely revised and updated edition.
Imprint:	Berlin ; New York : Springer, [1998] ©1998
Description:	1 online resource (xiv, 527 pages) : illustrations.
Language:	English
Series:	Springer series in optical sciences ; volume 45 Springer series in optical sciences ; v. 45.
Subject:	Scanning electron microscopy. Scanning electron microscopy.
Format:	E-Resource Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/11086185

Hidden Bibliographic Details
ISBN:	9783540389675 3540389679 9783642083723 3642083722 3540639764 9783540639763
Notes:	Includes bibliographical references and index. Print version record.
Summary:	Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Other form:	Print version: Reimer, Ludwig, 1928- Scanning electron microscopy. Second completely revised and updated edition 3540639764
Standard no.:	10.1007/978-3-540-38967-5

Table of Contents:

1. Introduction
2. Electron optics of a scanning electron microscope
3. Electron scattering and diffusion
4. Emission of backscattered and secondary electrons
5. Electron detectors and spectrometers
6. Image contrast and signal processing
7. Electron-beam-induced current and cathodoluminescence
8. Special techniques in SEM
9. Crystal structure analysis by diffraction
10. Elemental analysis and imaging with X-rays.