Introduction to microelectromechanical microwave systems /

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Bibliographic Details
Author / Creator:Santos, Héctor J. de los.
Edition:2nd ed.
Imprint:Boston : Artech House, ©2004.
Description:1 online resource (xiii, 221 pages) : illustrations
Language:English
Series:Artech House MEMS and sensors library
Artech House MEMS and sensors library.
Microelectromechanical systems series.
Subject:
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/11130960
Hidden Bibliographic Details
ISBN:158053872X
9781580538725
9781580538718
1580538711
Digital file characteristics:data file
Notes:Includes bibliographical references and index.
Print version record.
Summary:Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.
Other form:Print version: Santos, Héctor J. de los. Introduction to microelectromechanical microwave systems. 2nd ed. Boston : Artech House, ©2004 1580538711

MARC

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245 1 0 |a Introduction to microelectromechanical microwave systems /  |c Héctor J. de los Santos. 
250 |a 2nd ed. 
260 |a Boston :  |b Artech House,  |c ©2004. 
300 |a 1 online resource (xiii, 221 pages) :  |b illustrations 
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490 1 |a Artech House MEMS and sensors library 
504 |a Includes bibliographical references and index. 
520 8 |a Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment. 
588 0 |a Print version record. 
505 0 |a Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213 
650 0 |a Microwave devices.  |0 http://id.loc.gov/authorities/subjects/sh85084958 
650 0 |a Microelectromechanical systems.  |0 http://id.loc.gov/authorities/subjects/sh97007351 
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