Introduction to microelectromechanical microwave systems /

Introduction to microelectromechanical microwave systems /

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Bibliographic Details
Author / Creator:	Santos, Héctor J. de los.
Edition:	2nd ed.
Imprint:	Boston : Artech House, ©2004.
Description:	1 online resource (xiii, 221 pages) : illustrations
Language:	English
Series:	Artech House MEMS and sensors library Artech House MEMS and sensors library. Microelectromechanical systems series.
Subject:	Microwave devices. Microelectromechanical systems. Microelectromechanical systems. Microwave devices. Electronic books.
Format:	E-Resource Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/11130960

Hidden Bibliographic Details
ISBN:	158053872X 9781580538725 9781580538718 1580538711
Digital file characteristics:	data file
Notes:	Includes bibliographical references and index. Print version record.
Summary:	Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.
Other form:	Print version: Santos, Héctor J. de los. Introduction to microelectromechanical microwave systems. 2nd ed. Boston : Artech House, ©2004 1580538711

Table of Contents:

Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213