Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium - International Symposium on Ultra Clean Processing of Semiconductor Surfaces (11th : 2012 : Ghent, Belgium); Heyns, Marc; Mertens, Paul; Meuris, Marc (Diffusion and defect data. Solid state phenomena ;, 2013)