Interaction of ions with condensed matter /

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Bibliographic Details
Author / Creator:Galdikas, A. (Arvaidas)
Imprint:Huntington, N.Y. : Nova Science Publishers, c2000.
Description:176 p. : ill. ; 27 cm.
Language:English
Series:Horizons in world physics v. 229
Subject:
Format: Print Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/4480457
Hidden Bibliographic Details
Other authors / contributors:Prani͡avichi͡us, L. (Li͡udvikas)
ISBN:1560726660
Notes:Includes bibliographical references (p. [167]-174) and index.

MARC

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504 |a Includes bibliographical references (p. [167]-174) and index. 
505 0 0 |g 1.  |t Sputtering of Monoelemental Solids --  |g 1.1.  |t Ion Energy Losses --  |g 1.2.  |t Collision Cascades --  |g 1.3.  |t Physical Sputtering --  |g 2.  |t Sputtering of Multielement Solids --  |g 2.1.  |t Preferential Sputtering --  |g 2.2.  |t Modelling of Preferential Sputtering --  |g 3.  |t Formation of the Altered Layer --  |g 3.1.  |t Collisional Mixing --  |g 3.2.  |t Modelling of Collisional Mixing --  |g 3.3.  |t Thermal Diffusion --  |g 3.4.  |t Radiation Enhanced Diffusion --  |g 3.5.  |t Radiation Enhanced Diffusion and Sputtering --  |g 3.6.  |t Preferential Sputtering and Interdiffusion --  |g 3.7.  |t Radiation Activated Temperature Gradient Diffusion --  |g 3.8.  |t Segregation --  |g 4.  |t Surface Topography --  |g 4.1.  |t Development of Surface Roughness --  |g 4.2.  |t Roughening Effects on Ion Beam Profiling of Multilayers --  |g 4.3.  |t Modelling of Sputtering of Multilayers --  |g 5.  |t Heterogeneous Processes in Reactive Plasma --  |g 5.1.  |t Plasmochemical Etching --  |g 5.2.  |t Model of Etching Kinetics --  |g 5.3.  |t Etching Profiles --  |g 5.4.  |t Modelling of Etching Through a Mask. 
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