An automated photovoltaic system for the measurement of resistivity variations, in high-resistivity circular silicon slices /

An automated photovoltaic system for the measurement of resistivity variations, in high-resistivity circular silicon slices /

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Bibliographic Details
Author / Creator:	Blackburn, David L.
Imprint:	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.
Description:	iv, 35 p. : ill. ; 26 cm.
Language:	English
Series:	Semiconductor measurement technology NBS special publication 400-52
Subject:	Semiconductors -- Testing -- Equipment and supplies. Semiconductor wafers -- Testing. Silicon -- Electric properties. Semiconductor industry -- Automation. Semiconductor industry -- Automation. Semiconductor wafers -- Testing. Semiconductors -- Testing -- Equipment and supplies. Silicon -- Electric properties.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/6215444

Hidden Bibliographic Details
Notes:	Includes bibliographical references.
Govt.docs classification:	C 13.10:400-52

Description
Physical Description:	iv, 35 p. : ill. ; 26 cm.
Bibliography:	Includes bibliographical references.