Focused ion beam systems : basics and applications /

Focused ion beam systems : basics and applications /

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Bibliographic Details
Imprint:	Cambridge, UK ; New York : Cambridge University Press, 2007.
Description:	xi, 395 p. : ill. ; 26 cm.
Language:	English
Subject:	Focused ion beams. Focused ion beams -- Industrial applications. Ion bombardment. Focused ion beams. Ion bombardment.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/6643838

Hidden Bibliographic Details
Other authors / contributors:	Yao, Nan.
ISBN:	9780521831994 (hbk.) 0521831997 (hbk.)
Notes:	Includes bibliographical references and index.

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