Low pressure plasmas and microstructuring technology /

Low pressure plasmas and microstructuring technology /

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Bibliographic Details
Author / Creator:Franz, Gerhard, Dr. rer. nat.
Imprint:Berlin ; London : Springer, c2009.
Description:1 online resource.
Language:English
Subject:
Plasma (Ionized gases) -- Industrial applications.
Plasma engineering.
Plasma etching.
Plasma engineering.
Plasma etching.
Plasma (Ionized gases) -- Industrial applications.
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/8889206
Hidden Bibliographic Details
ISBN:9783540858492
3540858490
9786612128134
6612128135
9786612288104
6612288108
9783540858485
Notes:Includes bibliographical references.
Description based on print version record.
Other form:Print version: Franz, Gerhard, Dr. rer. nat. Low pressure plasmas and microstructuring technology. Berlin ; London : Springer, c2009 9783540858485 3540858482
Publisher's no.:11780793

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