Atomic layer epitaxy /

Atomic layer epitaxy /

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Bibliographic Details
Imprint:	Glasgow : Blackie ; New York : Chapman and Hall, 1990.
Description:	ix, 182 p. : ill. ; 24 cm.
Language:	English
Subject:	Thin films, Multilayered -- Technique. Epitaxy Layer structure (Solids) Surface chemistry Epitaxy. Layer structure (Solids) Surface chemistry. Thin films, Multilayered -- Technique.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/1045389

Hidden Bibliographic Details
Other authors / contributors:	Suntola, T. Simpson, M.
ISBN:	0412020114 (U.S.)
Notes:	Includes bibliographical references and index.

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Call Number:	QC176.9.M84A860 1990
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