Plasma-surface interactions and processing of materials : [proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988] /

Plasma-surface interactions and processing of materials : [proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988] /

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Bibliographic Details
Meeting name:	NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 : Alicante, Spain)
Imprint:	Dordrecht ; Boston : Kluwer Academic Publishers, c1990.
Description:	xiii, 557 p. : ill. ; 25 cm.
Language:	English
Series:	NATO ASI series. Series E, Applied sciences ; vol. 176 NATO ASI series. Series E, Applied sciences no. 176.
Subject:	Surfaces (Technology) -- Congresses. Materials -- Effect of radiation on -- Congresses. Microelectronics -- Materials -- Effect of radiation on -- Congresses. Plasma etching -- Congresses. Materials -- Effect of radiation on. Microelectronics -- Materials -- Effect of radiation on. Plasma etching. Surfaces (Technology) Conference papers and proceedings.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/1115025

Hidden Bibliographic Details
Other authors / contributors:	Auciello, Orlando
ISBN:	0792305841 (alk. paper)
Notes:	Includes bibliographical references.

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Call Number:	TA418.7.N360 1988
c.1	Available Loan period: standard loan Request from Mansueto Scan and Deliver Need help? - Ask a Librarian