Hidden Bibliographic Details
| ISBN: | 9781139164429
1139164422
9781139648936
1139648934
0521652146
9780521652148
9781139638487
1139638483
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| Notes: | Includes bibliographical references and index.
Print version record.
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| Summary: | "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--Jacket.
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| Other form: | Print version: Attwood, David T. Soft x-rays and extreme ultraviolet radiation. Cambridge ; New York : Cambridge University Press, 2000 0521652146
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