Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium /

Saved in:

Bibliographic Details
Meeting name:	International Symposium on Ultra Clean Processing of Semiconductor Surfaces (11th : 2012 : Ghent, Belgium)
Imprint:	Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013] ©2013
Description:	1 online resource (328 pages) : illustrations (black and white)
Language:	English
Series:	Solid state phenomena, 1012-0394 ; v. 195 Diffusion and defect data. Pt. B, Solid state phenomena ; v. 195.
Subject:	Electrical engineering -- Congresses. Semiconductors -- Surfaces -- Congresses. Electrical engineering. Semiconductors -- Surfaces. Conference papers and proceedings.
Format:	E-Resource Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/11217821

Hidden Bibliographic Details
Varying Form of Title:	UCPSS 2012
Other authors / contributors:	Heyns, Marc. Mertens, Paul. Meuris, Marc.
ISBN:	9783038139089 3038139084 9781680151091 1680151096 9783037855270 3037855274
Notes:	Includes bibliographical references and index. Access restricted to Ryerson students, faculty and staff. Online resource; title from PDF title page (ebrary, viewed November 1, 2013).
Summary:	This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications. Also covered are studies of general topics such as particle removal using acoustic enhancement, the removal of metallic contamination, pattern collapse of fine flexible and fragile features, wetting and drying, contamination control and contamination metrology. The FEOL and BEOL contributions also t.
Other form:	Print version: Ultra clean processing of semiconductor surfaces XI. Durnten-Zurich, Switzerland ; Trans Tech Publications, [2013] xiv, 332 pages : illustrations (black and white) ; 24 cm. Diffusion and defect data. Pt. B, Solid state phenomena ; v. 195 9783037855270 3037855274

Similar Items