Ultra Clean Processing of Semiconductor Surfaces XIII.

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Bibliographic Details
Author / Creator:	Mertens, Paul W.
Imprint:	Zurich : Trans Tech Publications, 2016.
Description:	1 online resource (395 pages)
Language:	English
Series:	Solid State Phenomena Vol. 255 Solid State Phenomena Vol. 255.
Subject:	Semiconductors -- Surfaces -- Congresses. Semiconductors -- Congresses. Semiconductors. Semiconductors -- Surfaces. Electronic books. Conference papers and proceedings.
Format:	E-Resource Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/11384300

Hidden Bibliographic Details
Other authors / contributors:	Meuris, Marc. Heyns, Marc.
ISBN:	9783035730845 3035730849 3035710848 9783035710847
Digital file characteristics:	data file
Notes:	Includes bibliographical references at the end of each chapters and index. Print version record.
Other form:	Print version: Mertens, Paul W. Ultra Clean Processing of Semiconductor Surfaces XIII. Zurich : Trans Tech Publications, ©2016 9783035710847

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