APA (7th ed.) Citation

Mertens, P. W., Meuris, M., & Heyns, M. (2016). Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications.

Chicago Style (17th ed.) Citation

Mertens, Paul W., Marc Meuris, and Marc Heyns. Ultra Clean Processing of Semiconductor Surfaces XIII. Zurich: Trans Tech Publications, 2016.

MLA (8th ed.) Citation

Mertens, Paul W., et al. Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications, 2016.