Chemical vapor deposition (CVD) : types, uses, and selected research /
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Imprint: | Hauppauge, New York : Nova Science Publishers, Inc., [2017] |
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Description: | 1 online resource. |
Language: | English |
Series: | Chemistry research and applications |
Subject: | |
Format: | E-Resource Book |
URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/11549333 |