Semiconductor factory and equipment clock synchronization for e-manufacturing /
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| Author / Creator: | Li, Ya-Shian. |
|---|---|
| Imprint: | [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2004] |
| Description: | 1 online resource (27 pages) : illustrations. |
| Language: | English |
| Series: | NISTIR ; 7184 NISTIR ; 7184. |
| Subject: | |
| Format: | E-Resource U.S. Federal Government Document Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/11861759 |