Semiconductor factory and equipment clock synchronization for e-manufacturing /

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Bibliographic Details
Author / Creator:Li, Ya-Shian.
Imprint:[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2004]
Description:1 online resource (27 pages) : illustrations.
Language:English
Series:NISTIR ; 7184
NISTIR ; 7184.
Subject:
Format: E-Resource U.S. Federal Government Document Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/11861759
Hidden Bibliographic Details
Other authors / contributors:Van Eck, Brad.
Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology)
International SEMATECH
Notes:"December 2004."
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page [1], viewed March 15, 2007.
Includes bibliographical references (pages 26-27).
Standard no.:GOVPUB-C13-67d3fbc3598ae3abfa730696d6074238
GPO item no.:0247-D (online)
Govt.docs classification:C 13.58:7184

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