Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects /
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| Imprint: | [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2006] |
|---|---|
| Description: | 1 online resource (21 unnumbered page) : illustrations. |
| Language: | English |
| Series: | NISTIR ; 7234 NISTIR ; 7234. |
| Subject: | |
| Format: | E-Resource U.S. Federal Government Document Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/11861945 |
MARC
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| 086 | 0 | |a C 13.58:7234 | |
| 245 | 0 | 0 | |a Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects / |c A. Emre Yarimbiyik [and others]. |
| 264 | 1 | |a [Gaithersburg, MD] : |b U.S. Dept. of Commerce, National Institute of Standards and Technology, |c [2006] | |
| 300 | |a 1 online resource (21 unnumbered page) : |b illustrations. | ||
| 336 | |a text |b txt |2 rdacontent |0 http://id.loc.gov/vocabulary/contentTypes/txt | ||
| 337 | |a computer |b c |2 rdamedia |0 http://id.loc.gov/vocabulary/mediaTypes/c | ||
| 338 | |a online resource |b cr |2 rdacarrier |0 http://id.loc.gov/vocabulary/carriers/cr | ||
| 490 | 1 | |a NISTIR ; |v 7234 | |
| 500 | |a "February 2006." | ||
| 500 | |a Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. | ||
| 500 | |a Title from page [1], viewed March 7, 2007. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Nanoelectromechanical systems. |0 http://id.loc.gov/authorities/subjects/sh2006008121 | |
| 650 | 0 | |a Thin films |x Size effects |x Computer simulation. | |
| 650 | 7 | |a Nanoelectromechanical systems. |2 fast |0 http://id.worldcat.org/fast/fst01741807 |0 http://id.worldcat.org/fast/1741807 | |
| 700 | 1 | |a Allen, Ricky. |0 http://id.loc.gov/authorities/names/n94020678 | |
| 700 | 1 | |a Blackburn, David L. |0 http://id.loc.gov/authorities/names/n77005427 | |
| 700 | 1 | |a Schafft, Harry A. |0 http://id.loc.gov/authorities/names/n80007899 | |
| 700 | 1 | |a Yarimbiyik, A. Emre. | |
| 700 | 1 | |a Zaghloul, Mona E. | |
| 710 | 2 | |a National Institute of Standards and Technology (U.S.). |b Semiconductor Electronics Division. |0 http://id.loc.gov/authorities/names/no90015380 | |
| 830 | 0 | |a NISTIR ; |v 7234. |0 http://id.loc.gov/authorities/names/n88507971 | |
| 856 | 4 | 0 | |u https://purl.fdlp.gov/GPO/gpo99378 |y Government Publishing Office |
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| 928 | |t Library of Congress classification |l Online |c UC-FullText |u https://purl.fdlp.gov/GPO/gpo99378 |z Government Publishing Office |g ebooks |i 11320992 | ||