Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) held in Bruges, Belgium, September 22-24, 2008 /

Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) held in Bruges, Belgium, September 22-24, 2008 /

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Bibliographic Details
Meeting name:International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th : 2018 : Leuven, Belgium), author.
Imprint:Stafa-Zuerich, Switzerland : Trans Tech Publications Ltd, [2018]
Description:1 online resource : color illustrations
Language:English
Subject:
Semiconductors -- Surfaces -- Congresses.
Semiconductors -- Surfaces.
Conference papers and proceedings.
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/12021451
Hidden Bibliographic Details
Other authors / contributors:Meuris, Marc.
Heyns, Marc.
ISBN:9783035734171
3035734178
9783035714173
3035714177
Notes:"Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium."
Includes bibliographical references and indexes.
Online resource; title from PDF title page (EBSCO, viewed October 4, 2018).
Other form:Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th : 2018 : Leuven, Belgium) author. Ultra clean processing of semiconductor surfaces XIV. Stafa-Zuerich, Switzerland : Trans Tech Publications Ltd, [2018] 3035714177 9783035714173

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