APA (7th ed.) Citation

International Symposium on Ultra Clean Processing of Semiconductor Surfaces, Meuris, M., & Heyns, M. (2018). Ultra clean processing of semiconductor surfaces XIV: 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) held in Bruges, Belgium, September 22-24, 2008. Trans Tech Publications Ltd.

Chicago Style (17th ed.) Citation

International Symposium on Ultra Clean Processing of Semiconductor Surfaces, Marc Meuris, and Marc Heyns. Ultra Clean Processing of Semiconductor Surfaces XIV: 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) Held in Bruges, Belgium, September 22-24, 2008. Stafa-Zuerich, Switzerland: Trans Tech Publications Ltd, 2018.

MLA (8th ed.) Citation

International Symposium on Ultra Clean Processing of Semiconductor Surfaces, et al. Ultra Clean Processing of Semiconductor Surfaces XIV: 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) Held in Bruges, Belgium, September 22-24, 2008. Trans Tech Publications Ltd, 2018.