Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

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Bibliographic Details
Author / Creator:	Vezzetti, Carol F.
Imprint:	Gaithersburg, Md. : U.S. Dept. of Commerce, National Institute of Standards and Technology ; Washington, D.C. : For sale by the Supt. of Docs., U.S. G.P.O., 1992.
Description:	xi, 37 p. : ill. ; 28 cm.
Language:	Undetermined English
Series:	Standard reference materials. NIST special publication 260-117
Subject:	Integrated circuits -- Calibration -- Standards. Microscopes -- Calibration -- Standards. Optical measurements -- Standards. Microscopes -- Calibration -- Standards. Optical measurements -- Standards.
Format:	Microform U.S. Federal Government Document Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/1461932

Hidden Bibliographic Details
Other authors / contributors:	Varner, Ruth N. Potzick, James E.
Notes:	"Issued January 1992." Includes bibliographical references. Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., 1992. 1 microfiche : negative.

Regenstein, B Level, Science Microforms

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Holdings details from Regenstein, B Level, Science Microforms
Call Number:	microfc TK7874.58.V499 1992
c.1	Available Loan period: standard loan Need help? - Ask a Librarian