User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

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Bibliographic Details
Author / Creator:	Lowney, J. R. (Jeremiah Ralph), 1946-
Imprint:	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., 1994.
Description:	iv, 39 p. : ill. ; 28 cm.
Language:	English
Series:	Semiconductor measurement technology. NIST special publication 400-95
Subject:	Scanning electron microscopy -- Computer programs -- Handbooks, manuals, etc. Electrons -- Scattering -- Computer simulation -- Handbooks, manuals, etc. Monte Carlo method -- Computer programs -- Handbooks, manuals, etc. Monte Carlo method -- Computer programs. Handbooks and manuals.
Format:	Microform U.S. Federal Government Document Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/2341631

Hidden Bibliographic Details
Other authors / contributors:	Marx, Egon. National Institute of Standards and Technology (U.S.)
Notes:	Distributed to depository libraries in microfiche. Shipping list no.: 94-0956-M. "August 1994." Includes bibliographical references. Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative.
GPO item no.:	0247 (MF)
Govt.docs classification:	C 13.10:400-95

Regenstein, B Level, Science Microforms

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Holdings details from Regenstein, B Level, Science Microforms
Call Number:	microfc QH212.S3L69 1994
c.1	Available Loan period: standard loan Need help? - Ask a Librarian