Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

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Bibliographic Details
Imprint:	New York, NY : American Institute of Physics, 1983-1990.
Description:	8 v. : ill. ; 29 cm.
Language:	English
Subject:	Vacuum. Vacuum technology. Vacuum technology. Periodicals.
Format:	Print Journal
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/2363201
Related Items:	Continues in part: Journal of vacuum science and technology Continued by: Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena

Hidden Bibliographic Details
Varying Form of Title:	Microelectronics processing and phenomena Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Other authors / contributors:	American Institute of Physics. American Vacuum Society.
Frequency:	Quarterly
ISSN:	0734-211X
Date / volume:	2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-v. 8, no. 4 (Oct.-Dec. 1990).
Notes:	Published for the American Vacuum Society.

Mansueto

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Call Number:	QC166.J862 c.1
Issues:	v.1-8(1983-1990)
c.1 : v.7 1989 pp.1053-2140	Available Loan period: standard loan Request from Mansueto Scan and Deliver Need help? - Ask a Librarian
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c.1 : v.1 1983 pp.1-518	Available Loan period: standard loan Request from Mansueto Scan and Deliver Need help? - Ask a Librarian