Planar test structures for characterizing impurities in silicon /
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| Imprint: | Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976. |
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| Description: | v, 25 p. : ill. ; 26 cm. |
| Language: | English |
| Series: | Semiconductor measurement technology. National Bureau of Standards special publication ; 400-21 NBS special publication 400-21. |
| Subject: | |
| Format: | U.S. Federal Government Document Print Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/268844 |
