Laser scanning of active semiconductor devices--videotape script /

Laser scanning of active semiconductor devices--videotape script /

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Bibliographic Details
Author / Creator:	Sawyer, David E.
Imprint:	Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976.
Description:	iii, 21 p. : ill. ; 26 cm.
Language:	English
Series:	Semiconductor measurement technology. NBS special publication 400-27
Subject:	Semiconductors -- Testing Optical scanners Lasers Lasers. Optical scanners. Semiconductor industry -- Laser use in. Semiconductors -- Testing.
Format:	U.S. Federal Government Document Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/268851

Hidden Bibliographic Details
Other authors / contributors:	Berning, David W.
Notes:	"This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards."
Govt.docs classification:	C 13.10:400-27.

Mansueto

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Call Number:	QC100.U524 no.400-27
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