Laser scanning of active semiconductor devices--videotape script /
Saved in:
| Author / Creator: | Sawyer, David E. |
|---|---|
| Imprint: | Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976. |
| Description: | iii, 21 p. : ill. ; 26 cm. |
| Language: | English |
| Series: | Semiconductor measurement technology. NBS special publication 400-27 |
| Subject: | |
| Format: | U.S. Federal Government Document Print Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/268851 |
MARC
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| 100 | 1 | |a Sawyer, David E. |0 http://id.loc.gov/authorities/names/n80014576 |1 http://viaf.org/viaf/60372414 | |
| 245 | 1 | 0 | |a Laser scanning of active semiconductor devices--videotape script / |c David E. Sawyer and David W. Berning. |
| 260 | 0 | |a Washington : |b U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., |c 1976. | |
| 300 | |a iii, 21 p. : |b ill. ; |c 26 cm. | ||
| 336 | |a text |b txt |2 rdacontent |0 http://id.loc.gov/vocabulary/contentTypes/txt | ||
| 337 | |a unmediated |b n |2 rdamedia |0 http://id.loc.gov/vocabulary/mediaTypes/n | ||
| 338 | |a volume |b nc |2 rdacarrier |0 http://id.loc.gov/vocabulary/carriers/nc | ||
| 440 | 0 | |a Semiconductor measurement technology. | |
| 440 | 0 | |a NBS special publication |v 400-27 | |
| 500 | |a "This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards." | ||
| 650 | 0 | |a Semiconductors |x Testing |0 http://id.loc.gov/authorities/subjects/sh85119917 | |
| 650 | 0 | |a Optical scanners |0 http://id.loc.gov/authorities/subjects/sh85095169 | |
| 650 | 0 | |a Lasers |0 http://id.loc.gov/authorities/subjects/sh85074788 | |
| 650 | 7 | |a Lasers. |2 fast |0 http://id.worldcat.org/fast/fst00992842 | |
| 650 | 7 | |a Optical scanners. |2 fast |0 http://id.worldcat.org/fast/fst01046803 | |
| 650 | 7 | |a Semiconductor industry |x Laser use in. |2 fast |0 http://id.worldcat.org/fast/fst01112151 | |
| 650 | 7 | |a Semiconductors |x Testing. |2 fast |0 http://id.worldcat.org/fast/fst01112261 | |
| 700 | 1 | 0 | |a Berning, David W. |0 http://id.loc.gov/authorities/names/n79089591 |1 http://viaf.org/viaf/77592882 |
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| 928 | |t Library of Congress classification |a QC100.U524 no.400-27 |l ASR |c ASR-SciASR |i 1712501 | ||
| 927 | |t Library of Congress classification |a QC100.U524 no.400-27 |l ASR |c ASR-SciASR |g Analytic |e CRERAR |b A13101632 |i 869334 | ||
