Laser scanning of active semiconductor devices--videotape script /
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| Author / Creator: | Sawyer, David E. |
|---|---|
| Imprint: | Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976. |
| Description: | iii, 21 p. : ill. ; 26 cm. |
| Language: | English |
| Series: | Semiconductor measurement technology. NBS special publication 400-27 |
| Subject: | |
| Format: | U.S. Federal Government Document Print Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/268851 |
