Notes on SEM examination of microelectronic devices /

Notes on SEM examination of microelectronic devices /

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Bibliographic Details
Author / Creator:	Devaney, John R.
Imprint:	Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off., 1977.
Description:	iv, 48 p. : ill. ; 26 cm.
Language:	English
Series:	Semiconductor measurement technology. NBS special publication 400-35
Subject:	Miniature electronic equipment -- Testing. Semiconductors -- Testing Scanning electron microscopes -- Technique. Miniature electronic equipment -- Testing. Scanning electron microscopy. Semiconductors -- Testing.
Format:	U.S. Federal Government Document Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/268909

Hidden Bibliographic Details
Other authors / contributors:	Leedy, Kathryn O. Keery, W. J.
Notes:	Includes bibliographical references.
Govt.docs classification:	C13.10:400-35.

Mansueto

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Call Number:	QC100.U524 no.400-35
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