Silicon micromachining /
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| Author / Creator: | Elwenspoek, M. (Miko), 1948- |
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| Imprint: | Cambridge ; New York : Cambridge University Press, 1998. |
| Description: | xiii, 405 p. ; ill. ; 27 cm. |
| Language: | English |
| Series: | Cambridge studies in semiconductor physics and microelectronic engineering ; 7 |
| Subject: | |
| Format: | Print Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/4017835 |
Crerar, Lower Level, Bookstacks
| Call Number: |
TK7871.15.S55E49 1998
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| c.1 | Available Loan period: standard loan Scan and Deliver Request for Pickup Need help? - Ask a Librarian |
