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971107s1998 enka b 001 0 eng |
| 010 |
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|a 97043732
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| 020 |
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|a 052159054X (hb)
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|a 97043732
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|a DLC
|c DLC
|d NhCcYBP
|d NhCcYBP
|d OrLoB-B
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| 050 |
0 |
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|a TK7871.15.S55
|b E49 1998
|
| 082 |
0 |
0 |
|a 621.3815
|2 21
|
| 100 |
1 |
|
|a Elwenspoek, M.
|q (Miko),
|d 1948-
|0 http://id.loc.gov/authorities/names/n97112781
|1 http://viaf.org/viaf/29757674
|
| 245 |
1 |
0 |
|a Silicon micromachining /
|c M. Elwenspoek and H.V. Jansen.
|
| 260 |
|
|
|a Cambridge ;
|a New York :
|b Cambridge University Press,
|c 1998.
|
| 300 |
|
|
|a xiii, 405 p. ;
|b ill. ;
|c 27 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|0 http://id.loc.gov/vocabulary/contentTypes/txt
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|0 http://id.loc.gov/vocabulary/mediaTypes/n
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|0 http://id.loc.gov/vocabulary/carriers/nc
|
| 440 |
|
0 |
|a Cambridge studies in semiconductor physics and microelectronic engineering ;
|v 7
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 505 |
0 |
0 |
|g 1.
|t Introduction --
|g 2.
|t Anisotropic wet chemical etching --
|g 3.
|t Chemical physics of wet chemical etching --
|g 4.
|t Wafer bonding --
|g 5.
|t Examples and applications --
|g 6.
|t Surface micromachining --
|g 7.
|t Isotropic wet chemical etching of silicon --
|g 8.
|t Introduction into dry plasma etching in microtechnology --
|g 9.
|t Why plasmas? --
|g 10.
|t What is plasma etching? --
|g 11.
|t Plasma system configurations --
|g 12.
|t Contact plasma etching --
|g 13.
|t Remote plasma etching --
|g 14.
|t High aspect ratio trench etching --
|g 15.
|t Moulding of microstructures --
|g 16.
|t Fabrication of movable microstructures.
|
| 650 |
|
0 |
|a Silicon.
|0 http://id.loc.gov/authorities/subjects/sh85122512
|
| 650 |
|
0 |
|a Micromachining.
|0 http://id.loc.gov/authorities/subjects/sh96011311
|
| 650 |
|
0 |
|a Etching.
|0 http://id.loc.gov/authorities/subjects/sh00005643
|
| 650 |
|
7 |
|a Etching.
|2 fast
|0 http://id.worldcat.org/fast/fst00915741
|
| 650 |
|
7 |
|a Micromachining.
|2 fast
|0 http://id.worldcat.org/fast/fst01019888
|
| 650 |
|
7 |
|a Silicon.
|2 fast
|0 http://id.worldcat.org/fast/fst01118631
|
| 700 |
1 |
|
|a Jansen, H.
|q (Henri)
|
| 901 |
|
|
|a ToCBNA
|
| 903 |
|
|
|a Hathi
|
| 903 |
|
|
|a HeVa
|
| 035 |
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|a (OCoLC)37955505
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| 929 |
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| 999 |
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|i de132b91-2d22-51fe-8167-994b9ba15ead
|s d0a61ba4-2ce2-5381-8345-395d9a505a58
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| 928 |
|
|
|t Library of Congress classification
|a TK7871.15.S55E49 1998
|l JCL
|c JCL-Sci
|i 4369144
|
| 927 |
|
|
|t Library of Congress classification
|a TK7871.15.S55E49 1998
|l JCL
|c JCL-Sci
|e CRERAR
|b 51086496
|i 6481248
|
