Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems : standard reference materials /

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems : standard reference materials /

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Bibliographic Details
Author / Creator:	Vezzetti, Carol F.
Imprint:	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service, 1992]
Description:	xii, 36 p. : il. ; 28 cm.
Language:	English
Series:	NIST special publication 260-119
Subject:	Microscopes -- Calibration -- Standards. Integrated circuits -- Masks -- Measurement. Chromium -- Spectra -- Standards. Chromium -- Spectra -- Standards. Integrated circuits -- Masks -- Measurement. Microscopes -- Calibration -- Standards.
Format:	Microform U.S. Federal Government Document Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/4309792

Hidden Bibliographic Details
Other title:	Standard reference materials. Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
Other authors / contributors:	Varner, Ruth N. Potzick, James E. National Institute of Standards and Technology (U.S.)
Notes:	Includes bibliographical references (p. iv-ix). Microfiche. [Washington, D.C.] : U.S. G.P.O., [1992]. 1 microfiche : negative.
GPO item no.:	0247 (MF)
Govt.docs classification:	C 13.10:260-119

Regenstein, B Level, Science Microforms

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Holdings details from Regenstein, B Level, Science Microforms
Call Number:	microfc QH211.V499 1992
c.1	Available Loan period: building use only Need help? - Ask a Librarian