|
|
|
|
| LEADER |
00000cam a2200000 a 4500 |
| 001 |
4309792 |
| 003 |
ICU |
| 005 |
20030530143000.0 |
| 007 |
herbmb---bucu |
| 008 |
930310s1992 dcua bb f000 0 eng d |
| 035 |
|
|
|a (OCoLC)27701163
|
| 040 |
|
|
|a GPO
|c GPO
|d SPI
|d OCL
|d OCoLC
|
| 049 |
|
|
|a CGUA
|
| 074 |
|
|
|a 0247 (MF)
|
| 086 |
0 |
|
|a C 13.10:260-119
|
| 100 |
1 |
|
|a Vezzetti, Carol F.
|0 http://id.loc.gov/authorities/names/n91123186
|1 http://viaf.org/viaf/75500137
|
| 245 |
1 |
0 |
|a Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems :
|b standard reference materials /
|c Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
|
| 260 |
|
|
|a Gaithersburg, MD :
|b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ;
|a [Springfield, VA :
|b Order from National Technical Information Service,
|c 1992]
|
| 300 |
|
|
|a xii, 36 p. :
|b il. ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|0 http://id.loc.gov/vocabulary/contentTypes/txt
|
| 337 |
|
|
|a microform
|b h
|2 rdamedia
|0 http://id.loc.gov/vocabulary/mediaTypes/h
|
| 338 |
|
|
|a microfiche
|b he
|2 rdacarrier
|0 http://id.loc.gov/vocabulary/carriers/he
|
| 440 |
|
0 |
|a NIST special publication
|v 260-119
|
| 504 |
|
|
|a Includes bibliographical references (p. iv-ix).
|
| 533 |
|
|
|a Microfiche.
|b [Washington, D.C.] :
|c U.S. G.P.O.,
|d [1992].
|e 1 microfiche : negative.
|
| 650 |
|
0 |
|a Microscopes
|x Calibration
|x Standards.
|0 http://id.loc.gov/authorities/subjects/sh2010006966
|
| 650 |
|
0 |
|a Integrated circuits
|x Masks
|x Measurement.
|
| 650 |
|
0 |
|a Chromium
|x Spectra
|x Standards.
|
| 650 |
|
7 |
|a Chromium
|x Spectra
|x Standards.
|2 fast
|0 http://id.worldcat.org/fast/fst00859980
|
| 650 |
|
7 |
|a Integrated circuits
|x Masks
|x Measurement.
|2 fast
|0 http://id.worldcat.org/fast/fst00975577
|
| 650 |
|
7 |
|a Microscopes
|x Calibration
|x Standards.
|2 fast
|0 http://id.worldcat.org/fast/fst01020052
|
| 700 |
1 |
|
|a Varner, Ruth N.
|0 http://id.loc.gov/authorities/names/n82157813
|1 http://viaf.org/viaf/65364168
|
| 700 |
1 |
|
|a Potzick, James E.
|0 http://id.loc.gov/authorities/names/n94025695
|1 http://viaf.org/viaf/63234206
|
| 710 |
2 |
|
|a National Institute of Standards and Technology (U.S.)
|0 http://id.loc.gov/authorities/names/n88112126
|1 http://viaf.org/viaf/131110795
|
| 740 |
0 |
|
|a Standard reference materials.
|
| 740 |
0 |
|
|a Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
|
| 903 |
|
|
|a HeVa
|
| 929 |
|
|
|a cat
|
| 999 |
f |
f |
|i 760aed18-5565-538a-92f8-ae7e34f20515
|s 4d6af889-3fa6-59bc-af25-ab8d4c3df27e
|
| 928 |
|
|
|t Library of Congress classification
|a QH211.V499 1992
|p microfc
|l JRL
|c JRL-SciMic
|i 4419267
|
| 927 |
|
|
|t Library of Congress classification
|a QH211.V499 1992
|p microfc
|l JRL
|c JRL-SciMic
|e CRERAR
|b H4309792
|i 6892258
|
