Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems : standard reference materials /

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems : standard reference materials /

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Bibliographic Details
Author / Creator:Vezzetti, Carol F.
Imprint:Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service, 1992]
Description:xii, 36 p. : il. ; 28 cm.
Language:English
Series:NIST special publication 260-119
Subject:
Microscopes -- Calibration -- Standards.
Integrated circuits -- Masks -- Measurement.
Chromium -- Spectra -- Standards.
Chromium -- Spectra -- Standards.
Integrated circuits -- Masks -- Measurement.
Microscopes -- Calibration -- Standards.
Format: Microform U.S. Federal Government Document Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/4309792
Hidden Bibliographic Details
Other title:Standard reference materials.
Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
Other authors / contributors:Varner, Ruth N.
Potzick, James E.
National Institute of Standards and Technology (U.S.)
Notes:Includes bibliographical references (p. iv-ix).
Microfiche. [Washington, D.C.] : U.S. G.P.O., [1992]. 1 microfiche : negative.
GPO item no.:0247 (MF)
Govt.docs classification:C 13.10:260-119

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