High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology /

High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology /

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Bibliographic Details
Author / Creator:	Orloff, Jon.
Imprint:	New York : Kluwer Academic/Plenum Publishers, c2003.
Description:	x, 303 p. : ill. ; 26 cm.
Language:	English
Subject:	Ion bombardment -- Industrial applications. Ion bombardment -- Industrial applications.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/4849378

Hidden Bibliographic Details
Other authors / contributors:	Swanson, Lynwood, 1934- Utlaut, Mark William, 1949-
ISBN:	030647350X
Notes:	Includes bibliographical references and index.

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Call Number:	QC702.7.B65 O75 2003
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