Fundamental electron interactions with plasma processing gases /

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Bibliographic Details
Author / Creator:Christophorou, L. G.
Imprint:New York : Kluwer Academic/Plenum Publishers, c2004.
Description:xii, 776 p. : ill. ; 26 cm.
Language:English
Series:Physics of atoms and molecules
Subject:
Format: Print Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/5053605
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Other authors / contributors:Olthoff, James Kenneth, 1958-
ISBN:0306480379
Notes:Includes bibliographical references and index.