Fundamental electron interactions with plasma processing gases /
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Author / Creator: | Christophorou, L. G. |
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Imprint: | New York : Kluwer Academic/Plenum Publishers, c2004. |
Description: | xii, 776 p. : ill. ; 26 cm. |
Language: | English |
Series: | Physics of atoms and molecules |
Subject: | |
Format: | Print Book |
URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/5053605 |
Mansueto
Call Number: |
QC794.6.C6 C48 2004
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c.1 | Available Loan period: standard loan Request from Mansueto Scan and Deliver Need help? - Ask a Librarian |