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00000pam a22000004a 4500 |
| 001 |
5053605 |
| 003 |
ICU |
| 005 |
20041111114200.0 |
| 008 |
031023s2004 nyua b 001 0 eng |
| 010 |
|
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|a 2003064029
|
| 020 |
|
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|a 0306480379
|
| 040 |
|
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|a DLC
|c DLC
|d DLC
|d OCoLC
|d OrLoB-B
|
| 042 |
|
|
|a pcc
|
| 050 |
0 |
0 |
|a QC794.6.C6
|b C48 2004
|
| 082 |
0 |
0 |
|a 539.7/57
|2 22
|
| 100 |
1 |
|
|a Christophorou, L. G.
|0 http://id.loc.gov/authorities/names/n79022906
|1 http://viaf.org/viaf/22424460
|
| 245 |
1 |
0 |
|a Fundamental electron interactions with plasma processing gases /
|c Loucas G. Christophorou and James K. Olthoff.
|
| 260 |
|
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|a New York :
|b Kluwer Academic/Plenum Publishers,
|c c2004.
|
| 300 |
|
|
|a xii, 776 p. :
|b ill. ;
|c 26 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|0 http://id.loc.gov/vocabulary/contentTypes/txt
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|0 http://id.loc.gov/vocabulary/mediaTypes/n
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|0 http://id.loc.gov/vocabulary/carriers/nc
|
| 440 |
|
0 |
|a Physics of atoms and molecules
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 505 |
0 |
0 |
|t Fundamental Electron-Molecule Interactions and Their Technological Significance --
|g 1.
|t Introduction --
|g 2.
|t Low Energy Electron-Molecule Interaction Processes --
|g 3.
|t Significance of Electron-Molecule Interactions in Plasma Processing --
|g 4.
|t The Present Work --
|t Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients --
|g 1.
|t Introduction --
|g 2.
|t Collision Cross Sections --
|g 3.
|t Coefficients and Rate Constants --
|g 4.
|t Boltzmann-Code-Generated Collision Cross-Section Sets --
|t Synthesis and Assessment of Electron Collision Data --
|g 1.
|t Introduction --
|g 2.
|t Synthesis, Assessment, and Recommendation of Data --
|g 3.
|t Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needs --
|g 4.
|t Dissemination and Updating of the Database --
|t Electron Interactions with CF[subscript 4], C[subscript 2]F[subscript 6], and C[subscript 3]F[subscript 8] --
|g 1.
|t Introduction --
|g 2.
|t Electron Interactions with CF[subscript 4] --
|g 3.
|t Electron Interactions with C[subscript 2]F[subscript 6] --
|g 4.
|t Electron Interactions with C[subscript 3]F[subscript 8] --
|t Electron Interactions with CHF[subscript 3], CF[subscript 3]I, and c-C[subscript 4]F[subscript 8] --
|g 1.
|t Introduction --
|g 2.
|t Electron Interactions with CHF[subscript 3] --
|g 3.
|t Electron Interactions with CF[subscript 3]I --
|g 4.
|t Electron Interactions with c-C[subscript 4]F[subscript 8] --
|t Electron Interactions with Cl[subscript 2], CCl[subscript 2]F[subscript 2], BCl[subscript 3], and SF[subscript 6] --
|g 1.
|t Introduction --
|g 2.
|t Electron Interactions with Cl[subscript 2] --
|g 3.
|t Electron Interactions with CCl[subscript 2]F[subscript 2] --
|g 4.
|t Electron Interactions with BCl[subscript 3] --
|g 5.
|t Electron Interactions with SF[subscript 6].
|
| 650 |
|
0 |
|a Electron-molecule collisions.
|0 http://id.loc.gov/authorities/subjects/sh85042224
|
| 650 |
|
0 |
|a Plasma (Ionized gases)
|0 http://id.loc.gov/authorities/subjects/sh85103050
|
| 650 |
|
7 |
|a Electron-molecule collisions.
|2 fast
|0 http://id.worldcat.org/fast/fst00906735
|
| 650 |
|
7 |
|a Plasma (Ionized gases)
|2 fast
|0 http://id.worldcat.org/fast/fst01066262
|
| 700 |
1 |
|
|a Olthoff, James Kenneth,
|d 1958-
|0 http://id.loc.gov/authorities/names/n90601281
|1 http://viaf.org/viaf/76600517
|
| 901 |
|
|
|a ToCBNA
|
| 903 |
|
|
|a HeVa
|
| 035 |
|
|
|a (OCoLC)53306532
|
| 929 |
|
|
|a cat
|
| 999 |
f |
f |
|i 8530d18c-5b93-59fd-a85c-79d881fd2f2a
|s 8d84f6ea-b025-52ae-81f2-46b07cfee445
|
| 928 |
|
|
|t Library of Congress classification
|a QC794.6.C6 C48 2004
|l ASR
|c ASR-SciASR
|i 4938372
|
| 927 |
|
|
|t Library of Congress classification
|a QC794.6.C6 C48 2004
|l ASR
|c ASR-SciASR
|e DOED
|e CRERAR
|b 65347359
|i 7601890
|
