Introduction to focused ion beams : instrumentation, theory, techniques, and practice /
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| Imprint: | New York : Springer Science, c2005. |
|---|---|
| Description: | xiv, 357 p. : ill. ; 25 cm. |
| Language: | English |
| Subject: | |
| Format: | Print Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/5623880 |
Table of Contents:
- The Focused Ion Beam Instrument
- Ion-Solid Interactions
- Focused Ion Beam Gases for Deposition and Enhanced Etch
- Three-Dimensional Nanofabrication Using Focused Ion Beams
- Device Edits and Modifications
- The Uses of Dual Beam FIB in Microelectronic Failure Analysis
- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
- FIB for Materials Science Applications-a Review
- Practical Aspects of FIB TEM Specimen Preparation
- FIB Lift-Out Specimen Preparation Techniques
- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
- Dual-Beam (FIB-SEM) Systems
- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
- Applications of FIB in Combination with Auger Electron Spectroscopy
- Appendices
- Index
