Capacitance cell measurement of the out-of-plane expansion of thin films /

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Bibliographic Details
Author / Creator:	Snyder, Chad R.
Imprint:	[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
Description:	1 online resource (x, 32 pages) : illustrations.
Language:	English
Series:	NIST special publication ; no. 960-7 NIST recommended practice guide NIST recommended practice guide. NIST special publication ; no. 960-7.
Subject:	Thin-film circuits. Thin films -- Thermal properties. Expansion (Heat) -- Measurement.
Format:	E-Resource U.S. Federal Government Document Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/8375883

Hidden Bibliographic Details
Other authors / contributors:	Mopsik, F. I. National Institute of Standards and Technology (U.S.)
Notes:	Title from title screen (viewed Apr. 19, 2011). "November 2001." "CODEN: NSPUE2." Includes bibliographical references (pages 31-32).
Other form:	Paper version: Snyder, Chad R. Capacitance cell measurement of the out-of-plane expansion of thin films.
GPO item no.:	0247 (online)
Govt.docs classification:	C 13.10:960-7

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