Surface analysis of reactive ion etched PZT thin films in SF6 plasma /

Surface analysis of reactive ion etched PZT thin films in SF6 plasma /

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Bibliographic Details
Author / Creator:Zakar, Eugene.
Imprint:Adelphi, MD : Army Research Laboratory, [2007]
Description:1 online resource (iv, 10 p.) : ill.
Language:English
Series:ARL-TR ; 4284
ARL-TR (Aberdeen Proving Ground, Md.) ; 4284.
Subject:
Surfaces (Technology) -- Analysis.
Thin films.
Piezoelectricity.
Piezoelectricity.
Surfaces (Technology) -- Analysis.
Thin films.
Format: E-Resource U.S. Federal Government Document Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/8734143
Hidden Bibliographic Details
Other authors / contributors:U.S. Army Research Laboratory.
Notes:Title from title screen (viewed on Feb. 23, 2012).
"September 2007."
Includes bibliographical references (p. 8-9).
Final; October 2005 to Septembe 2006.
Other form:Print version: Zakar, Eugene. Surface analysis of reactive ion etched PZT thin films in SF6 plasma
GPO item no.:0324-A-01 (online)
Govt.docs classification:D 101.133:4284

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