Surface analysis of reactive ion etched PZT thin films in SF6 plasma /

Surface analysis of reactive ion etched PZT thin films in SF6 plasma /

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Bibliographic Details
Author / Creator:	Zakar, Eugene.
Imprint:	Adelphi, MD : Army Research Laboratory, [2007]
Description:	1 online resource (iv, 10 p.) : ill.
Language:	English
Series:	ARL-TR ; 4284 ARL-TR (Aberdeen Proving Ground, Md.) ; 4284.
Subject:	Surfaces (Technology) -- Analysis. Thin films. Piezoelectricity. Piezoelectricity. Surfaces (Technology) -- Analysis. Thin films.
Format:	E-Resource U.S. Federal Government Document Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/8734143

Hidden Bibliographic Details
Other authors / contributors:	U.S. Army Research Laboratory.
Notes:	Title from title screen (viewed on Feb. 23, 2012). "September 2007." Includes bibliographical references (p. 8-9). Final; October 2005 to Septembe 2006.
Other form:	Print version: Zakar, Eugene. Surface analysis of reactive ion etched PZT thin films in SF6 plasma
GPO item no.:	0324-A-01 (online)
Govt.docs classification:	D 101.133:4284

Description
Item Description:	Title from title screen (viewed on Feb. 23, 2012). "September 2007."
Physical Description:	1 online resource (iv, 10 p.) : ill.
Bibliography:	Includes bibliographical references (p. 8-9).