Surface analysis of reactive ion etched PZT thin films in SF6 plasma /
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| Author / Creator: | Zakar, Eugene. |
|---|---|
| Imprint: | Adelphi, MD : Army Research Laboratory, [2007] |
| Description: | 1 online resource (iv, 10 p.) : ill. |
| Language: | English |
| Series: | ARL-TR ; 4284 ARL-TR (Aberdeen Proving Ground, Md.) ; 4284. |
| Subject: | |
| Format: | E-Resource U.S. Federal Government Document Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/8734143 |
MARC
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| 086 | 0 | |a D 101.133:4284 | |
| 100 | 1 | |a Zakar, Eugene. |0 http://id.loc.gov/authorities/names/no2012082838 |1 http://viaf.org/viaf/251068788 | |
| 245 | 1 | 0 | |a Surface analysis of reactive ion etched PZT thin films in SF6 plasma / |c Eugene Zakar. |
| 260 | |a Adelphi, MD : |b Army Research Laboratory, |c [2007] | ||
| 300 | |a 1 online resource (iv, 10 p.) : |b ill. | ||
| 336 | |a text |b txt |2 rdacontent |0 http://id.loc.gov/vocabulary/contentTypes/txt | ||
| 337 | |a computer |b c |2 rdamedia |0 http://id.loc.gov/vocabulary/mediaTypes/c | ||
| 338 | |a online resource |b cr |2 rdacarrier |0 http://id.loc.gov/vocabulary/carriers/cr | ||
| 490 | 1 | |a ARL-TR ; |v 4284 | |
| 513 | |a Final; |b October 2005 to Septembe 2006. | ||
| 500 | |a Title from title screen (viewed on Feb. 23, 2012). | ||
| 500 | |a "September 2007." | ||
| 504 | |a Includes bibliographical references (p. 8-9). | ||
| 650 | 0 | |a Surfaces (Technology) |x Analysis. |0 http://id.loc.gov/authorities/subjects/sh85130751 | |
| 650 | 0 | |a Thin films. |0 http://id.loc.gov/authorities/subjects/sh85134864 | |
| 650 | 0 | |a Piezoelectricity. |0 http://id.loc.gov/authorities/subjects/sh85102071 | |
| 650 | 7 | |a Piezoelectricity. |2 fast |0 http://id.worldcat.org/fast/fst01063933 | |
| 650 | 7 | |a Surfaces (Technology) |x Analysis. |2 fast |0 http://id.worldcat.org/fast/fst01139279 | |
| 650 | 7 | |a Thin films. |2 fast |0 http://id.worldcat.org/fast/fst01150018 | |
| 710 | 2 | |a U.S. Army Research Laboratory. |0 http://id.loc.gov/authorities/names/no93023636 |1 http://viaf.org/viaf/149860432 | |
| 776 | 0 | 8 | |i Print version: |a Zakar, Eugene. |t Surface analysis of reactive ion etched PZT thin films in SF6 plasma |w (OCoLC)777943081 |
| 830 | 0 | |a ARL-TR (Aberdeen Proving Ground, Md.) ; |v 4284. | |
| 856 | 4 | 0 | |u http://purl.fdlp.gov/GPO/gpo19262 |
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