Micromachined thin-film sensors for SOI-CMOS co-integration /

Micromachined thin-film sensors for SOI-CMOS co-integration /

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Bibliographic Details
Author / Creator:Laconte, J.
Imprint:Dordrecht : Springer, 2006.
Description:1 online resource (xiii, 292 p.) : ill.
Language:English
Subject:
Gas flow.
Thin film devices.
Silicon-on-insulator technology.
Metal oxide semiconductors, Complementary.
Gas flow.
Metal oxide semiconductors, Complementary.
Silicon-on-insulator technology.
Thin film devices.
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/8877770
Hidden Bibliographic Details
Other authors / contributors:Flandre, Denis.
Raskin, J. -P.
ISBN:9780387288437
0387288430
9786610634378
6610634378
0387288422 (Cloth)
9780387288420 (Cloth)
Notes:Includes bibliographical references and index.
Description based on print version record.
Other form:Print version: Laconte, J. Micromachined thin-film sensors for SOI-CMOS co-integration. Dordrecht : Springer, 2006 0387288422 9780387288420

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