Design and manufacturing of active microsystems /
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| Imprint: | Berlin ; Heidelberg ; New York : Springer, c2011. |
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| Description: | 1 online resource (xii, 444 p.) : col. ill. |
| Language: | English |
| Series: | Microtechnology and MEMS Microtechnology and MEMS. |
| Subject: | |
| Format: | E-Resource Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/8897637 |